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Patent us6409181
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ELECTROSTATIC CHUCK DEVICE - Patent application
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Patent US7649729 - Electrostatic chuck assembly - Google Patents
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What is a chuck and how does it work?
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Patent US8390980 - Electrostatic chuck assembly - Google Patentsuche
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Patent US6409181 - Combination type electric drill chuck structure
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E Type Manual Chuck for CNC Lathe & Milling
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Patent US6853533 - Full area temperature controlled electrostatic chuck